Explains the working principles of capacitive MEMS sensors, differential capacitors, MEMS microphones, and the impact of MEMS technology on consumer products.
Covers signal conditioners for resistive and capacitive sensors, including measurement methods, voltage dividers, Wheatstone bridges, and sensor interfaces.
Explores scaling laws and applications of electrostatics in MEMS, covering topics like parallel plate capacitors, zipping actuators, and MEMS gyroscopes.
