Capacitive MEMS Sensors: Working Principles

This lecture covers the working principles of capacitive MEMS sensors, focusing on motion sensing and differential capacitors. It explains how capacitors change capacity to detect motion, the concept of differential drive for sensing signals, and the design of differential capacitors with combs. The instructor discusses the applications of MEMS microphones in consumer products, the evolution of MEMS microphone markets, and the impact of MEMS technology on smartphones. Additionally, the lecture explores the fabrication process of MEMS microphones, sound inlet strategies, and the use of piezoelectric materials in MEMS technology.