Inspection and Metrology: Electrical Characterization of Thin Films

In course

Description

This lecture covers the evaluation of thin film quality and resistance using various metrology techniques such as optical microscopy and resistivity meters. It explains the Van der Pauw 4-point measurement method for assessing metal film quality and calculating resistivity. The lecture also discusses the measurement of Cr resistivity in bi-morph structures and the calculation of Cr resistance based on dimensions. Additionally, it explores the use of a prober station for electronic characterization and the importance of proper test pattern design to avoid device burnout and ensure ohmic contact.

In MOOCs (3)

Instructors (2)

Official source

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Related concepts (6)

Contact resistance

The term contact resistance refers to the contribution to the total resistance of a system which can be attributed to the contacting interfaces of electrical leads and connections as opposed to the intrinsic resistance. This effect is described by the term electrical contact resistance (ECR) and arises as the result of the limited areas of true contact at an interface and the presence of resistive surface films or oxide layers. ECR may vary with time, most often decreasing, in a process known as resistance creep.

Electrical resistance and conductance

The electrical resistance of an object is a measure of its opposition to the flow of electric current. Its reciprocal quantity is , measuring the ease with which an electric current passes. Electrical resistance shares some conceptual parallels with mechanical friction. The SI unit of electrical resistance is the ohm (Ω), while electrical conductance is measured in siemens (S) (formerly called the 'mho' and then represented by ℧). The resistance of an object depends in large part on the material it is made of.

Ohm's law

Ohm's law states that the current through a conductor between two points is directly proportional to the voltage across the two points. Introducing the constant of proportionality, the resistance, one arrives at the three mathematical equations used to describe this relationship: where I is the current through the conductor, V is the voltage measured across the conductor and R is the resistance of the conductor. More specifically, Ohm's law states that the R in this relation is constant, independent of the current.

Ohmmeter

An ohmmeter is an electrical instrument that measures electrical resistance (the opposition offered by a circuit or component to the flow of electric current). Multimeters also function as ohmmeters when in resistance-measuring mode. An ohmmeter applies current to the circuit or component whose resistance is to be measured. It then measures the resulting voltage and calculates the resistance using Ohm’s law . An ohmmeter should not be connected to a circuit or component that is carrying a current or is connected to a power source.

Electrical resistivity and conductivity

Electrical resistivity (also called volume resistivity or specific electrical resistance) is a fundamental specific property of a material that measures its electrical resistance or how strongly it resists electric current. A low resistivity indicates a material that readily allows electric current. Resistivity is commonly represented by the Greek letter ρ (rho). The SI unit of electrical resistivity is the ohm-metre (Ω⋅m).