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Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Explores proximity effect corrections in electron beam lithography for small and large features, emphasizing the importance of beam point spread function modeling.
Delves into nanoscale properties, emphasizing surface effects and quantum phenomena, exploring electronic, mechanical, magnetic, photonic, and chemical properties unique to the nanoscale.
