Lecture
Microfabrication Technologies
Description
This lecture covers microfabrication technologies, including lithography, dry etching, MEMS, and cleanroom processes. It discusses contact and proximity exposure, projection lithography, resolution enhancement techniques, phase shift masks, immersion lithography, and the similarities between microscopy and lithography. The instructor also presents examples of resist profiles, the microfabrication sequence, electron-sample interactions, and the complexity of chip manufacturing with multiple lithography steps.
Official source
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