MEMS and NEMS Systems

This lecture covers physical models for micro and nanosystems, focusing on MEMS and NEMS devices. It discusses the simplest MEMS/NEMS elements, examples of devices, and RF resonators for motion detection. The instructor explains the goals of MEMS/NEMS systems, such as force sensing and mass spectrometry. The lecture also delves into sensitive mass detection using nanotubes, electrostatic actuation, and tunability in nanotube-based systems. Additionally, it explores nanotube chirality, torsional oscillators with carbon nanotubes, and the types of mechanical responses in materials. Theoretical background on mechanics, Hooke's law at the nanoscale, and linear elastic responses in isotropic materials are also covered.