Scanning Electron Microscopy: Signals and Detectors

This lecture covers the principles of Scanning Electron Microscopy (SEM), including SEM signals, electron detectors, energy spectrum of electrons, interaction volume, and Monte-Carlo simulations. It also discusses SEM imaging with electrons, electron trajectories in matter, and the efficiency of X-ray generation. The lecture further explores the quantification of X-ray generation, the yield for secondary electrons and backscattered electrons, and the topographic contrast in SEM mode. Additionally, it delves into the spatial resolution in SEM, the processing of NbzSn multifilament superconducting cables, and the role of Cu and Ti in grain boundaries. The presentation concludes with a focus on the interaction volume simulation and the high spatial resolution in PZT layers.