Lecture

Sputtering Techniques: PVD4, DC, RF

In course

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Description

This lecture covers sputtering techniques used in Micro and Nanofabrication, including DC sputtering, RF sputtering, and Magnetron sputtering. It explains the setup, advantages, limitations, and conditions for each technique, such as plasma creation, self-bias capacitor, and target cooling requirements.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_eah79tfr

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Ontological neighbourhood

Physics

Electromagnetism: Electrostatics

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