Scanning Electron Microscopy: Operation and Analysis

This lecture covers the operation and analysis of a scanning electron microscope (SEM), including topics such as SEM controls, detectors, scanning modes, image acquisition parameters, and system vacuum. It also delves into the process of acquiring and analyzing spectra, confirming elements, calculating composition, and comparing spectra. The instructor demonstrates the use of the Aztec software for EDS-SEM analysis, showcasing features like guided analysis, specimen description, and spectrum comparison. Additionally, the lecture explores the SmartSEM software for SEM operation, focusing on beam detection, image scanning, stage control, and vacuum management.