Lecture
This lecture covers the basics of Optical MEMS and actuation mechanisms, focusing on consumer electronics and mobile applications. It discusses the terminology, spectral regions of interest, MOEMS uses, applications, devices, actuators' qualitative assessment, orders of magnitude, and electrostatic vs. magnetic actuation. The instructor explains the case for Optical MEMS, applications, market overview, and actuation principles. Various actuator types are explored, such as electrostatic parallel-plate actuators and comb drive actuators, emphasizing their design parameters and limitations.