Silicon Etching Techniques

This lecture covers various silicon etching techniques, including wet etching with examples like KOH, and dry etching methods such as reactive ion etching (RIE). It also discusses the fabrication process of the Utah array, detailing steps like backside dicing, glassing, grinding, and metallization. Additionally, impedance spectra measurements for in vitro and in vivo electrodes are presented, showing an impedance increase for frequencies above 1kHz. The lecture concludes with a study on active silicon probes, specifically Neuropixel, for recording neural activity in rats' brains.