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Lecture
Silicon Etching Techniques
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Related lectures (32)
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Neural Signal Recording: Electrode Types and Applications
Explores neural signal recording methods using various electrode types for in-vivo and in-vitro studies.
Fabrication extended: Etching
Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Brain-Computer Interfaces: Advancements in Systems Neuroscience
Covers brain-computer interfaces and their impact on systems neuroscience and neuroprosthetics.
Glass Microfabrication by Wet Etching
Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.
Dry Etching Techniques
Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.
Wet Etching: Thin Films and Microfabrication
Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.
Optimization of Neuroprosthetic Systems
Explores the optimization of neuroprosthetic systems, including sensory feedback restoration and neural stimulation strategies.
Micro and Nanofabrication
Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.
Dry Etching of Organic and Metal Films
Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.
Dry Etching: Techniques and Equipment
Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.