Thermal Scanning Probe Lithography: Nanometer Scale Patterning

This lecture by the instructor covers the history and development of Thermal Scanning Probe Lithography (t-SPL) at EPFL, focusing on the 'Millipede' data storage project. It explains the thermomechanical writing process with an AFM, the operation of the Millipede system, and the patterning principles using resist and substrate. The lecture also delves into 3D patterning, hot AFM tip nanolithography, pattern transfer into silicon, and greyscale lithography. It concludes with an overview of emerging nanopatterning techniques and the scope of nano-fabrication methods, including lithography and nano-imprint lithography.

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Data storage is the recording (storing) of information (data) in a storage medium. Handwriting, phonographic recording, magnetic tape, and optical discs are all examples of storage media. Biological molecules such as RNA and DNA are considered by some as data storage. Recording may be accomplished with virtually any form of energy. Electronic data storage requires electrical power to store and retrieve data. Data storage in a digital, machine-readable medium is sometimes called digital data.

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Computer data storage is a technology consisting of computer components and recording media that are used to retain digital data. It is a core function and fundamental component of computers. The central processing unit (CPU) of a computer is what manipulates data by performing computations. In practice, almost all computers use a storage hierarchy, which puts fast but expensive and small storage options close to the CPU and slower but less expensive and larger options further away.

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Nanoimprint lithography (NIL) is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint resist is typically a monomer or polymer formulation that is cured by heat or UV light during the imprinting. Adhesion between the resist and the template is controlled to allow proper release.

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Magnetic-tape data storage is a system for storing digital information on magnetic tape using digital recording. Tape was an important medium for primary data storage in early computers, typically using large open reels of 7-track, later 9-track tape. Modern magnetic tape is most commonly packaged in cartridges and cassettes, such as the widely supported Linear Tape-Open (LTO) and IBM 3592 series. The device that performs the writing or reading of data is called a tape drive.

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In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate.

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