Thermal Scanning Probe Lithography: Nanometer Scale Patterning

This lecture by the instructor covers the history and development of Thermal Scanning Probe Lithography (t-SPL) at EPFL, focusing on the 'Millipede' data storage project. It explains the thermomechanical writing process with an AFM, the operation of the Millipede system, and the patterning principles using resist and substrate. The lecture also delves into 3D patterning, hot AFM tip nanolithography, pattern transfer into silicon, and greyscale lithography. It concludes with an overview of emerging nanopatterning techniques and the scope of nano-fabrication methods, including lithography and nano-imprint lithography.