Sensors Technologies ComparisonExplores sensor technologies in MEMS, focusing on pressure sensors, accelerometers, and gyroscopes, and highlights the significance of sensor fusion.
Flexible guidance theoryDiscusses the design and importance of flexible guides in microtechnology, highlighting their benefits and applications in MEMS devices.
Capacitive Sensors: AccelerometerExplores capacitive sensors, particularly accelerometers, covering design, operation, transfer functions, and conditioning techniques.
Piezoelectric SensorsExplores piezoelectric sensors for force and pressure measurements, accelerometers, and calibration methods.
