Lectures related to Micro and Nanofabrication: Basics and Techniques

Related lectures (32)

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Wet Etching: Sacrificial Layers

Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.