Lecture

Stencil Lithography: Nanometer Scale Patterning

In course

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Description

This lecture covers the principles and applications of stencil lithography for high-resolution patterning at the nanometer scale, including the use of shadow masks, resistless techniques, and direct patterning. The instructor discusses the challenges such as membrane stability, clogging, and alignment issues in stencil lithography.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_tlo35jer

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Ontological neighbourhood

Chemical engineering

Nanotechnology: Topics in nanotechnology

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