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Lecture
Are you an EPFL student looking for a semester project?
Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
This lecture covers lithography as a method to print on smooth surfaces, defining patterns on polymer layers for micro/nano fabrication. It explains various types of lithography such as optical, electron beam, nano imprint, and more. The importance of lithography in establishing the minimum features that can be transferred is highlighted. The steps involved in lithography, including preparation of design and mask, mask fabrication, coating, exposure, resist properties, alignment, and development, are discussed. The lecture also addresses the main issues related to lithography.