Lecture

Sheaths and Plasma Etching

Description

This lecture covers topics related to sheaths and plasma etching, including sheath potential and density profiles, ion flux across a collisionless sheath, Bohm criterion, ion and electron densities, Poisson's equation in the sheath, and Bohm's consequences on ion velocity, ion flux, etch rate, and ion bombardment energy.

About this result
This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.