Lecture

Sheaths and Plasma Etching

Description

This lecture covers topics related to sheaths and plasma etching, including sheath potential and density profiles, ion flux across a collisionless sheath, Bohm criterion, ion and electron densities, Poisson's equation in the sheath, and Bohm's consequences on ion velocity, ion flux, etch rate, and ion bombardment energy.

In MOOCs (5)

Instructor

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Official source

https://mediaspace.epfl.ch/media/0_xp7ryp1o

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Ontological neighbourhood

Physics

Plasma physics: Fusion power

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