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Nicolas Ledermann

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Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Piezoelectric Pb(Zr-x,Ti1-x)O-3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors

Piezoelectric acoustic sensors and ultrasonic transducers based on textured PZT thin films

Simulation and characterization of piezoelectric micromachined ultrasonic transducers (PMUT's) based on PZT/SOI membranes

Piezoelectric response of thin films determined by charge integration technique: Substrate bending effects

{100}-textured, piezoelectric Pb(Zr-x Ti1-x)O-3 thin films for MEMS: integration, deposition and properties

Local growth of sol-gel films by means of microhotplates

Imaging by time-of-flight secondary ion mass spectrometry of plasma patterned metal and oxide thin films

High temperature micro-hotplate

Piezoelectric cantilever microphone for photoacoustic GAS detector