Giovanni Boero, Radivoje Popovic, Pierre-André Besse, Vincent Pott
Using a highly sensitive silicon Hall sensor fabricated in a standard complementary metal-oxide-semiconductor (CMOS) technology, we detect a single magnetic microbead of 2.8 μm in diameter. The miniaturized sensor has an active area of 2.4×2.4 μm 2, a sens ...
2002