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In this paper, we have designed a bistable microelectromechanical switch for an implantable lead electrode multiplexer application. Fabrication is based on a single mask process. State changes require an 18 V pulse to the actuators consuming only 0.2 nJ en ...
A new method to release MEMS chips from a wafer without dicing is presented. It can be applied whenever SOI wafers are used that are structured from both the device and the handle side using DRIE. This method enables the release of extremely fragile struct ...
A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and ob ...
From electrochemical measurements at the interface of two immiscible electrolytes, the current at controlled potential is usually a linear function of the ion concentration in the aqueous phase. Surprisingly, a linear relationship between the current and t ...
We present a lamellar grating interferometer realized with microelectromechanical system technology. It is used as a time-scanning Fourier-transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micro ...
A microfabrication process of a multifunctional probe is introduced for atomic force microscopy and various electrochemical measurements on biological samples in buffer solution. The silicon nitride probes have a spring constant lower than 0.1 N/m and a co ...
The limited electrode density and thus, the limited spatial resolution of substrate-integrated microelectrodes arrays (MEAs) used in in-vitro electrophysiology are currently considered as the main constraints of this technique. By taking advantage of the c ...
Many genomic assays rely on a distance-dependent interaction between luminescent labels, such as luminescence quenching or resonance energy transfer. We studied the interaction between electrochemically excited Ru(bpy) 3 2+ and Cy5 in a hybridization assay ...
This work presents a simple microfluidic device with an integrated thin-film heater for studies of DNA hybridization kinetics and double-stranded DNA melting temperature measurements. The heating characteristics of the device were evaluated with a novel, n ...
The steady-state electrical behavior of cation-selective ionophore membranes with different kinds of ionic additives was studied on a theoretical basis. Membranes with both mobile and fixed anionic sites exhibit nonlinear current-voltage curves, which is i ...