Marc Ilegems


Marc Ilegems obtained degrees in Electrical Engineering from the University of Brussels in 1965 and a doctorate in Electrical Engineering from Stanford University in 1970. From 1969 to 1977 he was a Member of Technical Staff at the Solid State Electronics Research Laboratory, Bell Laboratories, Murray Hill. He joined the Ecole Polytechnique Federale (Swiss Federal Institute of Technology) in Lausanne in October 1977 as Professor and Director of the new Interdepartmental Institute of Microelectronics (1977-1983) and subsequently as Director of the Institute of Micro- and Optoelectronics (1983-2000) and of the Semiconductor Device Physics Laboratory (1983-2005).

Prof. Ilegems served as Dean of the Department of Physics from 1998 to 2000, and as Director of the Swiss National Centre of Competence in Research (NCCR) in Quantum Photonics (2001-2005), the Swiss Priority Program OPTICS (1993-1999) and the Swiss National Program on Micro- and Optoelectronics (1983-90). He is a member of the Scientific Council and has acted as expert and consultant for several national and European research organizations.

His current activities include technical and patent consulting for private organizations, contributions to the definition and management of research programs in the framework of bilateral collaborations between Poland, Hungary and Switzerland (2011-2017), and participation as member of various ICT and FET review panels within the Horizon 2020 programme.

Prof. Ilegems received an honorary doctorate from the University of Toulouse (1998) and the Heinrich Welker Award from the Compound Semiconductor Symposium (2006) for his contributions to III-V semiconductor materials and device research.

The research activities of the Semiconductor Device Physics Laboratory centred on the physics and technology of semiconductor devices. The main subjects of interest included quantum photonics (semiconductor microcavities, light emitting diodes, lasers and detectors), wide bandgap semiconductor nitrides, physics of nano and low-dimensional structures, high electron mobility transistors, crystal growth and materials technology. The research programs were carried out in close collaboration with numerous academic and industrial groups in Switzerland and abroad, in particular within the framework of programs of the European Community.

Earlier research topics pursued at Bell Laboratories and at EPFL include Molecular Beam Epitaxy and doping of GaAs and AlGaAs thin films with applications to heterostructure lasers, detectors, and Bragg mirrors, hydride vapor phase epitaxy and physical characterization of GaN on sapphire, liquid-solid phase diagrams of ternary III-V compound systems, and silicon-based non-volatile memory cells.

Prof. Ilegems is the author or co-author of over 250 scientific publications (citation index h = 48) and 7 book chapters, and has supervised over 30 doctoral students in Lausanne. His academic contacts include stays as invited professor at Stanford University (1994) and at the Polytechnic University of Madrid (2007).


  • NCCR Quantum Photonics -
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