Publications by Paul Muralt | EPFL Graph Search

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High temperature micro-hotplate

Characterization and model of ferroelectrics based on experimental Preisach density

Tungsten based electrodes for stacked capacitor ferroelectric memories

Ferroelectric and piezoelectric properties of Nb doped PZT films

Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering

Piezoelectric cantilever microphone for photoacoustic GAS detector

Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition

Micromachined infrared detectors based on pyroelectric thin films

Excess lead in the perovskite lattice of PZT thin films made by in-situ reactive sputtering

Processing optimization of solution derived PbZr1-xTixO3 thin films for piezoelectric applications