Publications by Paul Muralt | EPFL Graph Search

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Microstructural and electrical properties of (Sr,Ba)Nb2O6 thin films grown by pulsed laser deposition

Thickness dependence of the properties of highly c-axis textured AlN thin films

Simulation and characterization of piezoelectric micromachined ultrasonic transducers (PMUT's) based on PZT/SOI membranes

Piezoelectric response of thin films determined by charge integration technique: Substrate bending effects

{100}-textured, piezoelectric Pb(Zr-x Ti1-x)O-3 thin films for MEMS: integration, deposition and properties

Local growth of sol-gel films by means of microhotplates

Imaging by time-of-flight secondary ion mass spectrometry of plasma patterned metal and oxide thin films

Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Strain-induced diffuse dielectric anomaly and critical point in perovskite ferroelectric thin films