Lukas Derendinger

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Lukas Derendinger

Design, characterisation and modelling of a high current DC arc plasma source for silicon and silicon carbide processing at low pressure

Measurements and consequences of nonuniform radio frequency plasma potential due to surface asymmetry in large area radio frequency capacitive reactors

Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: The telegraph effect

Design, characterisation and modelling of a high current DC arc plasma source for silicon and silicon carbide processing at low pressure

Measurements and consequences of nonuniform radio frequency plasma potential due to surface asymmetry in large area radio frequency capacitive reactors

Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: The telegraph effect