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Lukas Derendinger

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Related publications (3)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Design, characterisation and modelling of a high current DC arc plasma source for silicon and silicon carbide processing at low pressure

Lukas Derendinger

In the frame of this thesis, two similar high current DC arc (HCDCA) plasma sources were investigated in a low gas pressure regime (10-3-10-2 mbar). One of them was initially designed for the epitaxial growth of silicon and silicon germanium (LEP), the oth ...

EPFL2008

Probe measurements of plasma potential nonuniformity due to edge asymmetry in large-area radio-frequency reactors: the telegraph effect

Christoph Hollenstein, Alan Howling, Laurent Fabien Hubert Sansonnens, Hannes Schmidt, Lukas Derendinger

In large-area radio-frequency (rf) capacitive reactors, the redistribution of rf current to maintain current continuity near asymmetric sidewalls causes a perturbation in rf plasma potential to propagate along the resistive plasma between capacitive sheath ...

2005

Measurements and consequences of nonuniform radio frequency plasma potential due to surface asymmetry in large area radio frequency capacitive reactors

Christoph Hollenstein, Alan Howling, Laurent Fabien Hubert Sansonnens, Benjamin Strahm, Lukas Derendinger

In large area reactors, a local asymmetry of the electrode area, due to lateral grounded walls, causes a perturbation in rf plasma potential, due to the redistribution of lateral rf current, which propagates along the resistive plasma between capacitive sh ...

2005