Victor Plessky

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Analysis of XBAR resonance and higher order spurious modes

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Victor Plessky

A suspended 400nm thin mono-crystalline ZY cut Lithium Niobate (LN) membrane with narrow interdigital electrodes (IDEs) on top having a pitch of the order of few microns excites standing shear bulk acoustic wave resonance (XBAR) within the membrane through ...

IEEE2019

Fabrication Of Lithium Niobate Bulk Acoustic Resonator For 5G Filters

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Victor Plessky, Muhammad Faizan

This work presents the fabrication of a MEMS resonant device which addresses the need for high quality and miniaturized RF filters in the 3-6 GHz range for 5th generation (5G) mobile networks. The 4-mask fabrication process is based on the definition of in ...

IEEE2019

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Soumya Yandrapalli, Victor Plessky, Muhammad Faizan

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis ...

IEEE2019

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