Publications by Sebastiano Merzaghi

Development of a Hybrid MEMS BLDC Micromotor

Yves Perriard, Christian Köchli, Sebastiano Merzaghi

This paper addresses the design of a new hybrid microelectromechanical systems (MEMS) micromotor. It is a small three-phase axial flux brushless dc (BLDC) motor. The stator is developed following the almost-standard CMOS technology rules used for MEMS manu ...

Institute of Electrical and Electronics Engineers2011

Analyse et mise en oeuvre d'un moteur électromagnétique microfabriqué

Sebastiano Merzaghi

Until now, the preferred solution for MEMS (Micro Electro Mechanical Systems) actuation is the electrostatic one. The main reason is that this kind of actuators can be easily manufactured following the microfabrication rules, as their geometry perfectly fi ...

EPFL2010

Development of a Hybrid MEMS BLDC Micromotor

Yves Perriard, Christian Köchli, Sebastiano Merzaghi

This paper addresses the design of a new hybrid MEMS micromotor. It is a small 3-phases axial flux BLDC motor. The stator is realized following the almost CMOS technology rules used for MEMS manufacture and the coils have two copper layers. The rotor is ma ...

2009

Development of Planar Microcoils for an Electromagnetic Linear Actuator Fabricated in Batch-Type Wafer Technology

Yves Perriard, Pascal Meyer, Sebastiano Merzaghi

2008