Until now, the preferred solution for MEMS (Micro Electro Mechanical Systems) actuation is the electrostatic one. The main reason is that this kind of actuators can be easily manufactured following the microfabrication rules, as their geometry perfectly fi ...
This paper addresses the design of a new hybrid microelectromechanical systems (MEMS) micromotor. It is a small three-phase axial flux brushless dc (BLDC) motor. The stator is developed following the almost-standard CMOS technology rules used for MEMS manu ...
Institute of Electrical and Electronics Engineers2011
This paper addresses the design of a new hybrid MEMS micromotor. It is a small 3-phases axial flux BLDC motor. The stator is realized following the almost CMOS technology rules used for MEMS manufacture and the coils have two copper layers. The rotor is ma ...
