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Marc Antonius Friedrich van den Boogaart

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Marc Antonius Friedrich van den Boogaart

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Towards reliable 100-nanometer scale stencil lithography on full wafer: Progress and challenges

A Compact and Low-Power CMOS Circuit for Fully-Integrated NEMS Resonators

Predicting mask distortion, clogging and pattern transfer for stencil lithography

Nanostenciling for fabrication and interconnection of nanopatterns and microelectrodes

Nanostenciling for combinatorial fabrications and interconnections of nanopatterns and microelectrodes

Dry etching for the correction of gap-induced blurring and improved pattern resolution in nanostencil lithography

Synthesis of localized 2D-layers of silicon nanoparticles embedded in a SiO2 layer by a stencil-masked ultra-low energy ion implantation process

Selective deposition of gold nanoparticles using Van der Waals interactions

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

Fabrication of metallic patterns by microstencil lithography on polymer surfaces suitable as microelectrodes in integrated microfluidic systems