We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the direct ...
Presently, the cells' electrical activity is measured either by extracellular microelectrode array (MEA) or by microscopic fluorescence imaging methods. The MEA is a non-invasive in vitro technique which allows long-term recording at multicellular level wh ...
A new bio-interface for active MEAs is presented in this paper. Unlike standard approaches that deposit MEA electrodes using post-processing of the integrated circuit, the proposed structure is based on Ti/Pt microelectrodes inserted by microfabrication in ...
This paper presents a highly sensitive photo-detector array deposited on a glass substrate with an integrated optical filter. The active element is a vertically integrated hydrogenated amorphous silicon photodiode featuring a dark current of less than 1e-1 ...
