We report a transduction optimization method of piezo-based MEMS structures using segmentation of the excitation electrodes. Optimal transduction is achieved by matching the electric field distribution to the polarization distribution including the direct ...
This paper presents a highly sensitive photo-detector array deposited on a glass substrate with an integrated optical filter. The active element is a vertically integrated hydrogenated amorphous silicon photodiode featuring a dark current of less than 1e-1 ...
Presently, the cells' electrical activity is measured either by extracellular microelectrode array (MEA) or by microscopic fluorescence imaging methods. The MEA is a non-invasive in vitro technique which allows long-term recording at multicellular level wh ...
A new bio-interface for active MEAs is presented in this paper. Unlike standard approaches that deposit MEA electrodes using post-processing of the integrated circuit, the proposed structure is based on Ti/Pt microelectrodes inserted by microfabrication in ...
