Michela Antonella Barbieri

This person is no longer with EPFL

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

About
Privacy
Disclaimer

Graph Chatbot

About this result

Related publications (1)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Related publications (1)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Effect of substrate roughness on c-oriented AlN thin films

Paul Muralt, Alvaro Artieda, Michela Antonella Barbieri

(001)-textured AlN thin films as needed for bulk acoustic wave devices exhibit large mechanical stress variations as a function of growth substrate properties. We studied the relationship between stress and the surface morphology of a thermally oxidized si ...

2009

Effect of substrate roughness on c-oriented AlN thin films

Paul Muralt, Alvaro Artieda, Michela Antonella Barbieri

2009