Yves-Alain Peter

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Related publications (2)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Related publications (2)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

MEMS Tunable Asymmetric Fabry-Perot Cavity for High-Precision Weighing of Macro Samples

Luc Thévenaz, Alexandre Poulin, Yves-Alain Peter

We propose a microelectromechanical systems-based tunable asymmetric Fabry-Perot cavity for the high-precision weighing of macro samples. The device is based on an in-plane design and is structured in a silicon-on-insulator substrate. The cavity length of ...

Institute of Electrical and Electronics Engineers2013

Yves-Alain Peter

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MEMS Tunable Asymmetric Fabry-Perot Cavity for High-Precision Weighing of Macro Samples

Introduction to the Issue on Nanophotonics and Optical MEMS

MEMS Tunable Asymmetric Fabry-Perot Cavity for High-Precision Weighing of Macro Samples

Introduction to the Issue on Nanophotonics and Optical MEMS