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A novel centimetre scale tip tilt piston mirror mechanism has been designed in silicon. The mirror consists of three identical mechanism parts and one mirror part. The fabrication of the parts was done with photolithography and Deep Reactive Ion Etching an ...
This thesis presents the design and microfabrication technology of a tip-tilt, 2 degree of freedom "mirror system" made out of Silicon On Insulator (SOI) wafers with two movable mirrors that have diameter of 10 mm. The system was intended for precise beam ...
This paper reports a high fill-factor (>90%), 2-dimensional analog micromirror array designed specifically for very high, optically induced thermal load applications. Each pixel can attain a mechanical DC rotation angle of ±4 degrees around any arbitrary a ...