Luis Guillermo Villanueva Torrijo

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Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS

Luis Guillermo Villanueva Torrijo, David Ruffieux, Soumya Yandrapalli

Integration of CMOS electronic circuits and electromechanical resonators has been pursued for a long time by many different research groups and even foundries. This would improve the overall performance of electromechanical oscillators and sensors. However ...

Institute of Electrical and Electronics Engineers2017

Asymmetrically coupled resonators for mass sensing

Luis Guillermo Villanueva Torrijo

Mechanically coupled resonators have been applied in the last years to the development of nanomechanical mass-sensors based on the detection of the different vibration modes of the system by measuring on a single resonator. Their sensitivity and capability ...

American Institute of Physics2017

Release area confinement in Contour Mode Resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

In this paper we propose a modified fabrication process to finely define the region surrounding the resonator that undergoes Si etching in CMRs. The unpredictable undercut has been shown to lead to Q instability within microns' variation. High aspect ratio ...

Ieee2017

Nonlinearities in NEMS

Luis Guillermo Villanueva Torrijo

2017

Nonlinearities and Frequency Stability in NEMS

Luis Guillermo Villanueva Torrijo

2017

Frequency fluctuations in silicon nanoresonators

Luis Guillermo Villanueva Torrijo, Eric Sage, Thomas Alava

Frequency stability is key to the performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally induced vibrations. Although measurements and predictions of resonator stability usually disregard ...

Nature Publishing Group2016

We here present a study on the influence of metal electrodes on the anchor losses in Contour Mode Resonators (CMRs). Our Finite Element Modelling (FEM) simulation results show that electrode material is key to determine the acoustic losses, and therefore t ...

Ieee2016

Graphene Based Mechanical Resonators Fabricated via Direct Dry Transfer

Luis Guillermo Villanueva Torrijo, Tom Larsen, Marco Di Gisi

We present here the fabrication of large suspended sheets of graphene for mechanical resonators. The diameter of the circular resonators varies from 1.2 μm to 26.5 μm resulting in diameter-to-thickness aspect ratios as large as 74000. The membranes were fa ...

2016

50 nm thick AlN Films for Actuation and Detection of Nanoscale Resonators

Paul Muralt, Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Ramin Matloub Aghdam, Kaitlin Marie Howell, Waqas Bashir

We report on the optimization of a multilayer platinum/aluminum nitride (AlN) stack with an AlN active layer thickness of 50 nm for piezoelectric actuation in nanoelectromechanical systems (NEMS). Experiments in reactive sputtering of AlN were used to find ...

2016

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Tom Larsen, Antoine Nicolas Désiré Aupée

We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in m ...

2016

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Asymmetrically coupled resonators for mass sensing

Luis Guillermo Villanueva Torrijo

American Institute of Physics2017

Frequency fluctuations in silicon nanoresonators

Luis Guillermo Villanueva Torrijo, Eric Sage, Thomas Alava

Nature Publishing Group2016

Ieee2016

Anchor Losses Dependence on Electrode Material in Contour Mode Resonators

Luis Guillermo Villanueva Torrijo

Andrea Lozzi