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Scott Harada

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Related publications (7)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

A combinatorial chemical beam vapour deposition approach to tune the electrical conductivity of Nb:TiO2 films via Si co-doping

Paul Muralt, Silviu Cosmin Sandu, Estelle Wagner, Scott Harada, Giacomo Benvenuti, Marc Jobin

Chemical beam vapour deposition (CBVD) is a thin film deposition technique operated under high vacuum conditions in which film growth occurs through the thermally activated chemical decomposition of precursor molecules at the substrate surface. This techni ...

Elsevier Science Sa2016

A unique approach to reveal the nanocomposite nc-MN/SiN-layer architecture of thin films via electrical measurements

Rosendo Sanjines, Silviu Cosmin Sandu, Scott Harada

By addition of Si to a binary transition metal nitride MN (e.g. TiN, ZrN, NbN, CrN), the hardness, thermal stability and chemical inertness of films have been considerably improved. The formation of a ternary M–Si–N ternary phase is possible under specific ...

2010

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

Paul Muralt, Andreea Veronica Savu, Silviu Cosmin Sandu, Estelle Wagner, Scott Harada, Giacomo Benvenuti

Chemical Beam Vapour Deposition is a gas phase deposition technique, operated under high vacuum conditions, in which evaporated chemical precursors are thermally decomposed on heated substrates to form a film. In the particular equipment used in this work, ...

Elsevier2015