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Giacomo Benvenuti

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Related publications (7)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Evaluation of niobium dimethylamino-ethoxide for chemical vapour deposition of niobium oxide thin films

Patrik Willi Hoffmann, Ali Dabirian, Yury Kuzminykh, Estelle Wagner, Giacomo Benvenuti

Chemical vapour deposition (CVD) processes depend on the availability of suitable precursors. Precursors that deliver a stable vapour pressure are favourable in classical CVD processes, as they ensure process reproducibility. In high vacuum CVD (HV-CVD) pr ...

Elsevier2014

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

Paul Muralt, Andreea Veronica Savu, Silviu Cosmin Sandu, Estelle Wagner, Scott Harada, Giacomo Benvenuti

Chemical Beam Vapour Deposition is a gas phase deposition technique, operated under high vacuum conditions, in which evaporated chemical precursors are thermally decomposed on heated substrates to form a film. In the particular equipment used in this work, ...

Elsevier2015

A combinatorial chemical beam vapour deposition approach to tune the electrical conductivity of Nb:TiO2 films via Si co-doping

Paul Muralt, Silviu Cosmin Sandu, Estelle Wagner, Scott Harada, Giacomo Benvenuti, Marc Jobin

Chemical beam vapour deposition (CBVD) is a thin film deposition technique operated under high vacuum conditions in which film growth occurs through the thermally activated chemical decomposition of precursor molecules at the substrate surface. This techni ...

Elsevier Science Sa2016