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Rokhaya Gueye

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Related publications (5)

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3D-Integration of a Carbon Nanotube based RF-NEMS

Rokhaya Gueye

In the framework of the NanoTera project CabTuRes, a system-in-package for a nano-resonator was proposed, integrating CMOS driving electronics and vacuum encapsulation. This doctoral research aimed to investigate 3D-integration technologies for a Single-Wa ...

EPFL2013

Fabrication and formation of Ta/Pt-Si ohmic contacts applied to high-temperature Through Silicon Vias (TSVs)

Nico de Rooij, Danick Briand, Terunobu Akiyama, Rokhaya Gueye

Platinum/tantalum/silicon ohmic contacts were designed, fabricated and characterized to withstand high-temperature post-processing: the ohmic behavior was maintained after 1 h annealing, at temperatures up to 850 degrees C in an oxidizing environment. A LP ...

Elsevier2013

High-temperature compatible 3D-integration processes for a vacuum-sealed CNT-based NEMS

Nico de Rooij, Danick Briand, Terunobu Akiyama, Rokhaya Gueye

A System-in-Package (SiP) concept for the 3D-integration of a Single Wall Carbon Nanotube (SWCNT) resonator with its CMOS driving electronics is presented. The key element of this advanced SiP is the monolithic 3D-integration of the MEMS with the CMOS elec ...

SPIE - International Society of Optical Engineering2013

Platinum TSVs for High-Temperature Processing and Operation of Microsystems

Nico de Rooij, Danick Briand, Terunobu Akiyama, Rokhaya Gueye

We report on the fabrication and characterization of high-temperature Pt-TSVs. A LPCVD silicon nitride passivation layer was implemented to protect the TSVs from oxidation during high-temperature treatments and wet HF-based post-processing steps, the later ...

2012

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We report on harsh-environment-compatible Pt-TSVs forming ohmic contacts with a highly doped bulk silicon. They were developed as a part of a Single Wall Carbone NanoTube (SWCNT) resonator device with 3D-packaging. The fundamental properties of the TSVs, e ...

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2011