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Tobias Bandi

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Related publications (6)

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Where is the limit? Yield strength improvement in silicon micro-structures by surface treatments

Antonia Neels, Alex Dommann, Tobias Bandi

Imperfections, like surface roughness and defects, introduced by common manufacturing processes are recognized to favor failure of microfabricated components and systems. Up to now only a reduced part of the ideal strength prediction by zero Kelvin quantum ...

Wiley-V C H Verlag Gmbh2016

Reliability Aspects of Microelectromechanical Systems for Space Applications

Tobias Bandi

Microelectromechanical systems (MEMS) are an essential ingredient in many technological innovations and a source of game-changing inventions in the automotive industry, space exploration, consumer electronics and medical applications due to its capability ...

EPFL2014

Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions

Herbert Shea, Alex Dommann, Tobias Bandi

This work reports on irradiations made on silicon bulk-acoustic wave resonators. The resonators were based on a tuning fork geometry and actuated by a piezoelectric aluminum nitride layer. They had a resonance frequency of 150 kHz and a quality factor of a ...

2014

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ABSTRACT The mechanical stability of silicon MEMS dies is strongly influenced by the microfabrication processes, especially grinding, dicing and etching, which leave characteristic damage (defects, cracks, dislocations...) in the substrate material. Specia ...

2014

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We report on the susceptibility of structural MEMS materials to proton radiation damage. Radiation tests at spacerelevant doses were conducted on MEMS resonators. The two materials examined were single crystal silicon and SU-8, which are both in widespread ...

2013

Proton-Radiation Tolerance of Silicon and SU-8 as Structural Materials for High-Reliability MEMS

Herbert Shea, Antonia Neels, Alex Dommann, Tobias Bandi

The susceptibility of single-crystal silicon and SU-8 resonators to proton-radiation induced degradation was investigated. Both materials are in widespread use for microsystems structures, thus the stability of the mechanical properties must be ensured ove ...

Institute of Electrical and Electronics Engineers2013