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In recent years, magnetic-based technologies, like nanomagnet logic (NML), are gaining increasing interest as possible substitutes of CMOS transistors. The possibility to mix logic and memory in the same device, coupled with a potential low power consumpti ...
A five-layer stack of lead zirconate titanate (PZT) thin films with Pt electrodes was fabricated for potential applications in nanoactuator systems. The 1 mu m thick PZT films were deposited by a sol-gel technique, the platinum electrodes by sputtering. Th ...
Wiley-Blackwell2014
In this work the fabrication of a piezoelectrically actuated microswitch for high current applications is proposed. The device was obtained by assembling two silicon substrates: one containing the signal lines and the other enclosing a silicon nitride (Si3 ...
Elsevier Science Bv2014
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Lead zirconate titanate (PZT) thin films on insulator-buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more energy than parallel plate electrode (PPE) structures because the former exploit the longitudinal pie ...
A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at ...
Institute of Electrical and Electronics Engineers2012
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The use of interdigitated electrodes (IDEs) in conjunction with ferroelectric thin films shows many attractive features for piezoelectric MEMS applications. In this work, growth of {1 0 0}-textured lead zirconate titanate (PZT) thin films was achieved on i ...
A measurement setup for the detailed study of the transverse piezoelectric coefficient e(31,f) in the converse (actuator) mode was developed. It allows the assessment of the piezoelectric stress in thin films on silicon cantilevers and provides for a corre ...
Institute of Electrical and Electronics Engineers2015
