Person

Tao Yang

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Related publications (8)

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3D metal freeform micromanufacturing

Andreas Mortensen, Yves Bellouard, Raphaël Charvet, Fatmah Ebrahim, Cyril Dénéréaz, Léa Deillon, Tao Yang, Enrico Casamenti, Luciano Borasi, Sacha Jérémy Florentin Pollonghini

Despite remarkable progress made in recent years, producing freeform three-dimensional micro-components out of copper, silver or gold and their alloys remains an engineering challenge: current processes are either too slow to be economically viable, or pro ...

2021

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Vibration monitoring plays a key role in numerous applications, including machinerypredictive maintenance, shock detection, space applications, packaging-integrity monitoring andmining. Here, we investigate mechanical nonlinearities inherently present in s ...

2021

To harness light-matter interactions at the nano-/micro-scale, better tools for control must be developed. Here, it is shown that by applying an external electric and/or magnetic field, ablation of Si and glass under ultra-short (sub-1 ps) laser pulse irra ...

2020

The last few decades have witnessed exciting advances in micro-opto-electro-mechanical systems (MOEMS) including revolutionary development of fabrication processes and an ever increasing expansion of their domain of applications. In parallel, femtosecond l ...

EPFL2017

We investigate both theoretically and experimentally a laser-based controlled tuning of the nonlinear behaviors of a single mechanical resonator. Thanks to localized three-dimensional modifications induced by femtosecond-laser irradiation, a Duffing-like o ...

2017

Progress on femtosecond laser-based system-materials: three-dimensional monolithic electrostatic micro-actuator for optomechanics

Yves Bellouard, Tao Yang

Femtosecond laser-dielectric interaction in a three-dimensional (3D) manner defines a capable platform for integrated 3D micro-devices fabricated out of a single piece of system-material. Here, we add a new function to femtosecond laser-based single monoli ...

Spie-Int Soc Optical Engineering2016

Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser

Yves Bellouard, Tao Yang

We demonstrate a three-dimensional (3D) monolithic micro-actuator fabricated by non-ablative femtosecond laser micromachining and subsequent chemical etching. The actuating principle is based on dielectrophoresis. An analytical modeling of this actuation s ...

Institute of Physics2015

Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers

Yves Bellouard, Tao Yang

Non-linear laser-matter interaction offers the possibility to structure transparent material in three dimensions. Here, we demonstrate that such process can be implemented for fabricating novel type of microsystems, including actuators transparent to visib ...

IEEE2013