Person

David Bowman

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Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

Cyrille Hibert, Sven Holmström, Sertan Kutal Gökce, David Bowman

A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in pl ...
Institute of Electrical and Electronics Engineers2011