MEMSMEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.
PhotolithographyIn integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate.
Flexibility methodIn structural engineering, the flexibility method, also called the method of consistent deformations, is the traditional method for computing member forces and displacements in structural systems. Its modern version formulated in terms of the members' flexibility matrices also has the name the matrix force method due to its use of member forces as the primary unknowns. Flexibility is the inverse of stiffness. For example, consider a spring that has Q and q as, respectively, its force and deformation: The spring stiffness relation is Q = k q where k is the spring stiffness.
