Feature size effects in chemically assisted ion beam etching of InP-based photonic crystals
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Photonic crystals are periodic dielectric structures, where the periodicity varies in one, two or three dimensions. Analogous to the periodic potential of electrons in semiconductors, the periodic variation of the dielectric constant influences the electro ...
We have studied the fabrication of high-aspect ratio silicon tips by a combination of deep reactive ion etching and focused ion beam. The reactive ion etching is used to obtain so-called "rocket tips" which can be fabricated with a high aspect ratio. The r ...
The possibility of using surface-adsorbed monolayers on oxidized GaAs single crystals is investigated to explore liquid crystal (LC) wettability and alignment. A technological process is developed to chemically activate the GaAs surface with a view to perf ...
The evaporation through shadow masks (nanostencils) overcomes the limitations typically given by the patterning methods involving conventional optical lithography and etching, such as diffraction limits and etch-selectivity. It allows making low-cost nanop ...
Micro- and nano-optical structures offer the possibility to control light on a wavelength scale. This allows further miniaturization of integrated optical circuits. Planar photonic crystal waveguides and microcavities are considered basic building blocks f ...
Photonic crystal (PC) cavities enable localization of light into volumes (V) below a cubic optical wavelength (smaller than any other types of optical resonators) with high quality (Q) factors [1]. This permits a strong interaction of light and matter, whi ...
In this letter, we take advantage of the high coefficient of thermal expansion (CTE) of a chemically amplified, epoxy-based negative polymer (SU-8) to define a low-power consumption polymeric variable optical attenuator that combines the working principles ...
Photonic crystals are periodic dielectric structures, where the periodicity varies on the wavelength scale. Analogous to electrons in semiconductors, the photon propagation can be described using a band structure in which transmission bands are separated b ...
The use of shadow masks (stencils) for nanopatterning overcomes the limitations typically present by patterning methods involving conventional optical lithography and etching, such as diffraction limit and etch selectivity. Nanostencils allow for resistles ...