Three-dimensional electronic devices fabricated on a top-down silicon nanowire platform
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Photonic crystals are periodic dielectric structures having periodicity of the order of the wavelength. Consequently, they offer the ability to control the propagation of electromagnetic waves in a similar way as the periodic potential aspects the electron ...
Institut de Microtechnique, Université de Neuchâtel2006
We report the development of piezoresistive cantilevers for intermolecular force detection in biochemical sensing, by using a commercial CMOS technology. The detection of the small forces involved in molecular recognition requires cantilevers with a small ...
Micro- and nano-optical structures offer the possibility to control light on a wavelength scale. This allows further miniaturization of integrated optical circuits. Planar photonic crystal waveguides and microcavities are considered basic building blocks f ...
Stencil lithography is an innovative method for patterning that has a great flexibility from many points of view. It is based on shadow mask evaporation using thin silicon nitride membranes that allow the patterning of sub-100 nm features up to 100 μm in a ...
We report the development of piezoresistive cantilevers for intermolecular force detection in biochemical sensing, by using a commercial CMOS technology. The detection of the small forces involved in molecular recognition requires cantilevers with a small ...
Semiconductor nanowires have received much attention owing to their potential use as building blocks of miniaturized electrical(1), nanofluidic(2) and optical devices(3). Although chemical nanowire synthesis procedures have matured and now yield nanowires ...
We report the development of piezoresistive cantilevers for intermolecular force detection in biochemical sensing, by using a commercial CMOS technology. The detection of the small forces involved in molecular recognition requires cantilevers with a small ...
We present all-optical tuning and switching of a microcavity inside a two-dimensional photonic crystal waveguide. The photonic crystal structure is fabricated in silicon-on-insulator using complementary metal-oxide semiconductor processing techniques based ...
For the purpose of integrating nanomechanical structures with CMOS circuitry, nanostencil lithography ensures parallel patterning for rapid processing at wafer scale and nanometer-sized features definition. Moreover, this patterning technique is compatible ...
As dictated by ongoing technology scaling and the advent of multi-core systems, each new generation of microprocessors and digital signal processors provides higher computing power and data throughput. However, the available bandwidth of the input/output ( ...