Publication
Dynamic stencil lithography on full wafer scale
Related publications (35)
Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication
Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...
EPFL2023Synthesis of metal oxide-overcoated carbon materials by liquid phase ALD and their applications in catalysis
Coating nano particles and other substrates for efficiency enhancement, protection and obtaining new atomic structures is a widespread research topic in catalysis and material synthesis. Thus far, different approaches of coating, ranging from simplest to s ...
EPFL2023Nanobridge Stencil Enabling High Resolution Arbitrarily Shaped Metallic Thin Films on Various Substrates
Jürgen Brugger, Giovanni Boero, Yi-Chiang Sun
Stencil lithography (SL), which uses a perforated membrane as a reusable shadow mask to locally add material patterns on substrates provides a simple but versatile approach for the fabrication of functional devices on a large variety of substrate materials ...
WILEY2022Silicon Oxide Walls
Nowadays almost all the mobile networks use the 4G and will eventually soon use the 5G. To use this technology, devices need lots of band filters. This is why the Advanced NEMS laboratory of the EPFL is developing a new kind of MEMS resonant device at 5GHz ...
2021Deposition of Thin Alumina Films Containing 3D Ordered Network of Nanopores on Porous Substrates
Self-supporting thin films containing nanopores are very promising materials for use for multiple applications, especially in nanofiltration. Here, we present a method for the production of nanomembranes containing a 3D ordered network of nanopores in an a ...
2020Suspended micro/nano channel resonators: a review
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina
Micro- and nano-electromechanical systems (M/NEMS) have demonstrated outstanding sensing capabilities down to the yoctogram (10(-24) g) scale in vacuum environment and cryogenic temperatures. In order to bring such extraordinary resolution levels into the ...
IOP PUBLISHING LTD2020Iron-coated polymer films with high antibacterial activity under indoor and outdoor light, prepared by different facile pre-treatment and deposition methods
César Pulgarin, Sami Rtimi, Stefanos Giannakis, Ania Schärer
In the present work, we study the fabrication of self-cleaning antibacterial surfaces, active under indoor or outdoor light. In order to obtain the highest activity with the lowest complexity we assess mild conditions of preparation (temperatures), pre-tre ...
ELSEVIER SCIENCE BV2019Peptide-Enhanced Selective Surface Deposition of Polymer-Based Fragrance Delivery Systems
Surface deposition is a critical step in the application of fragrance-containing products. This contribution presents a novel strategy to enhance the deposition of polymer-based fragrance delivery systems onto cotton substrates from the application medium ...
2017Optimization of Sputter Deposition Process for Piezoelectric AlN Ultra-Thin Films
Kaitlin Marie Howell, Roman Welz
The sputtering conditions for the deposition of the layers underneath active AlN films were analyzed for improving the quality of the active AlN, and the dependence of AlN deposition temperature on crystalline quality was investigated, where a reduced depo ...
2017Combinatorial HV-CVD survey of barium triisopropyl cyclopentadienyl and titanium tetraisopropoxide for the deposition of BaTiO3
Patrik Willi Hoffmann, Yury Kuzminykh, Michael Oliver Reinke
Barium titanate is a very promising material for the integration of optical communication into electronic integrated circuits. For a successful integration into CMOS compatible technology, a growth process has to be found which allows forming crystalline B ...
Wiley-VCH Verlag Berlin2015