Use of scanning capacitance microscopy for controlling wafer processing
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We present an automation technique for the growth of electron beam deposited tips on whole wafers of atomic force microscope cantilevers. This technique uses pattern recognition on scanning electron microscope images of successive magnifications to precise ...
A quartz tuning-fork (TF)-based scanning probe is presented for local electrical transport measurements on quantum devices below the liquid 4He temperature. The TF is utilized to drive and sense the mechanical oscillation of an attached, microfabricated ca ...
We report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define ...
Conventional Hall devices are widely employed to measure magnetic fields produced by millimetre sized (or larger) current-caring conductors or permanent magnets with a standard active area of about (100 um)^2. Micro-Hall sensors have recently emerged as a ...
A new scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The lowest resonance frequency of this scanner is above 22 kHz. The X and Y scan ranges are 13 micrometers and the Z range is 4 ...
The atomic force microscope (AFM) is limited in imaging speed by the bandwidth and dynamic behavior of the actuators and mechanical parts. For high-speed imaging all AFM components have to be optimized in performance. Here, we present improvements of the f ...
‘Real-time’ nanoscale imaging and single molecule force spectroscopy of bio-chemical specimen based on atomic force microscopy (AFM) requires cantilevers with both low force constant and high-resonant frequency. The required spring constant should be betwe ...