Miniature lamellar grating interferometer based on silicon technology
Graph Chatbot
Chat with Graph Search
Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
The increase of components density in advanced microelectronics is practically dictated by the device size and the achievable pitch between the devices. Scaling down dimensions of devices and progress in the circuit design allowed following Moore's law dur ...
We present the modeling and experimental characterization of a monolithic 3-phase rotary stepper micromotor which employs a flexure suspension to guide the rotor. The monolithic structure avoids any frictional contact during operation, providing a precise, ...
Stencil lithography is an innovative method for patterning that has a great flexibility from many points of view. It is based on shadow mask evaporation using thin silicon nitride membranes that allow the patterning of sub-100 nm features up to 100 μm in a ...
Silicon dioxide (SiO2) films grown on silicon monocrystal (Si) substrates form the gate oxides in current Si-based microelectronics devices. The understanding at the atomic scale of both the silicon oxidation process and the properties of the Si(100)-SiO2 ...
We demonstrate the use of copolymer micelle lithography using polystyrene-block-poly(2-vinylpyridine) reverse micelle thin films in their as-coated form to create nanopillars with tunable dimensions and spacing, on different substrates such as silicon, sil ...
Flexible bearings are advantageous for microelectromechanical systems as they enable precise, accurate, repeatable, and reliable motion without frictional contact. Based on the principle of a rotary folded-beam suspension, we have designed, fabricated, mod ...
Institute of Electrical and Electronics Engineers2012
Silicon has been, and continues to be, the material support of integrated circuit (IC) technology-the enabling tool of one of the most impressive technological, industrial and social revolution of mankind. Silicon (both in monocrystalline and polycrystalli ...
A new kind of high contrast, MEMS-based reflective display system is being developed. The system consists of light reflective flaps on an optically absorptive surface. The novelty is that the flaps are in vertical position at their rest state. They can be ...
Silicon on Insulator (SOI) is an interesting alternative to bulk silicon for the fabrication of integrated circuits due to its advantages with respect to the junction leakage, low switching noise coupling, high temperature immunity, low voltage and low pow ...
This paper intends to provide a brief survey of the most advanced implementations of molecular analysis tools based on microtechnologies and to discuss a new approach for the development of integrated molecular analysis. The technique presented hereafter c ...