High coupling materials for thin film bulk acoustic wave resonators
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Using Landau-Ginzburg-Devonshire theory and tetragonal BaTiO3 as an example, this letter demonstrates that strong electric bias fields applied antiparallel to spontaneous polarization may lead to a large enhancement of piezoelectric properties in monodomai ...
Lead oxide based ferroelectrics, represented by lead zirconate titanate (Pb(Zr,Ti)O-3) or PZT) are the most widely used materials for piezoelectric actuators, sensors and transducers due to their excellent piezoelectric properties. Considering lead toxicit ...
Thin film piezoelectric materials offer a number of advantages in microelectromechanical systems (MEMS), due to the large motions that can be generated, often with low hysteresis, the high available energy densities, as well as high sensitivity sensors wit ...
Novel, highly sensitive piezoelectric acoustic sensors based on partially unclamped Pb(Zr-x, Ti1-x)O-3 (PZT) coated cantilever and bridge have been fabricated by silicon micromachining. High sensitivity at low frequencies (5-100 Hz) has been achieved by pa ...
Properties and fabrication status of microdevices for microwaves based on polar ceramics are reviewed. We discuss bulk acoustic wave devices with AlN films, rf-MEMS capacitive switches with high permittivity materials, and tunable ferroelectrics. The relev ...
Three wet chemistry routes were used to synthesize Ba0.99Zr0.8Y0.2O3-delta (BZY20) and to avoid the drawbacks of the conventional mixed oxide route used for its preparation. Pure samples were prepared using the Matrix Trapping and Decomposition (MTD) and P ...
A review is given on the current state of the art in piezoelectric micromachined ultrasonic transducers (pMUT). It is attempted to quantify the limits of pMUT's with respect to the electromechanical coupling, and to relate current achievements. Main needs ...
A hydrothermal processing route was used to produce anisotropic submicrometer particles of potassium niobate-tantalates and pure potassium niobate. Piezoelectric activity, switching polarization, and piezoelectric hysteresis loops were observed in these fe ...
Growth and properties of sputter in situ sputter deposited Pb(Z,Ti)O-3 (PZT) thin films have been studied on (111)-textured Pt electrodes as a function of seed layers of the type (TiO2)(x)(PbO)(y). The PZT process was run with a limited lead excess resulti ...
The possibilities of sub-micron patterning by means of microstencils using pulsed laser deposition were investigated. Stencils with circular and elliptical patterns were used, with pore sizes ranging from 1 mum down to 500 nm. Strontium titanate (SrTiO3), ...