High coupling materials for thin film bulk acoustic wave resonators
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Pb(Zr, Ti)O-3 (PZT) and Pb(Zr, Ti, Nb)O-3 (PNZT) thin films have been deposited on platinized silicon substrates by sputtering followed by a postannealing treatment. The Nb concentration in the films varied between 1 and 7 at. % with increments of 1 at. %. ...
Thickness mode resonances in commercial piezoelectric ceramics have been characterised as a function of frequency by two methods. The first is based on a fit on the electrical impedance for the fundamental and the overtones. This method has been applied to ...
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